Title:
成膜装置
Document Type and Number:
Japanese Patent JP4985547
Kind Code:
B2
Inventors:
Hashimoto Shin
Tatsuya Tanabe
Tatsuya Tanabe
Application Number:
JP2008146001A
Publication Date:
July 25, 2012
Filing Date:
June 03, 2008
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01L21/205
Domestic Patent References:
| JP5102044A | ||||
| JP2005057064A | ||||
| JP2008069067A | ||||
| JP2003119100A | ||||
| JP6112135A | ||||
| JP2008019130A |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa