Title:
窒化アルミニウム基板
Document Type and Number:
Japanese Patent JP4987345
Kind Code:
B2
Inventors:
Yusaku Harada
Application Number:
JP2006124623A
Publication Date:
July 25, 2012
Filing Date:
April 28, 2006
Export Citation:
Assignee:
DENKI KAGAKU KOGYO KABUSHIKI KAISHA
International Classes:
C04B35/626; H01L23/15; H05K1/03
Domestic Patent References:
| JP3103315A | ||||
| JP8081266A | ||||
| JP2004083867A | ||||
| JP2000355760A | ||||
| JP2007186385A |