Title:
マスクデータ生成方法およびマスクデータ生成システム
Document Type and Number:
Japanese Patent JP4996972
Kind Code:
B2
Inventors:
Shinya Ito
Application Number:
JP2007133749A
Publication Date:
August 08, 2012
Filing Date:
May 21, 2007
Export Citation:
Assignee:
Renesas Electronics Corporation
International Classes:
G03F1/68; G03F1/36; H01L21/027
Domestic Patent References:
| JP2001013669A | ||||
| JP2003142584A | ||||
| JP2006235184A | ||||
| JP2002328457A | ||||
| JP2008176303A |
Foreign References:
| WO2006118098A1 |
Attorney, Agent or Firm:
Shinji Hayami