Title:
マイクロ真空計
Document Type and Number:
Japanese Patent JP5002861
Kind Code:
B2
Abstract:
A micro vacuum gauge includes a substrate, a floating structure that is held above the substrate by a supporting structure extending from the substrate in a state where the floating structure is thermally isolated from the substrate, a heat generator that is arranged in the floating structure to generate heat, and a temperature sensor that is arranged in the floating structure to measure a difference in temperature between the substrate and the floating structure. A second member having a lower emissivity than a first member surrounding the heat generator and the temperature sensor is formed at least on a surface of the floating structure by being joined to the first member.
Inventors:
Masafumi Kimata
Application Number:
JP2009551589A
Publication Date:
August 15, 2012
Filing Date:
January 30, 2009
Export Citation:
Assignee:
School corporation Ritsumeikan
International Classes:
G01L21/10
Domestic Patent References:
| JPH07325002A | 1995-12-12 | |||
| JP2006153782A | 2006-06-15 | |||
| JPH08166269A | 1996-06-25 |
Attorney, Agent or Firm:
Mitsuhiko Watanabe