Title:
単結晶ダイヤモンドの製造方法
Document Type and Number:
Japanese Patent JP5002982
Kind Code:
B2
Abstract:
The object of the present invention is to obtain a high quality single crystalline diamond that has less distortion and large area suitable for semiconductor device substrates or an optical component material. The present invention is a single crystalline diamond produced by chemical vapor deposition, wherein, when a linear polarized light which is composed of two linear polarized lights perpendicular to each other is introduced into one main face of the single crystalline diamond, a maximum value of a retardation between the two linear polarized lights perpendicular to each other which come out from an opposite main face is not more than 50 µm at maximum per a thickness of 100 µm across an entire of the single crystalline diamond, and also a method for producing the diamond.
Inventors:
Kiichi Meguro
Yoshiyuki Yamamoto
Takahiro Imai
Yoshiyuki Yamamoto
Takahiro Imai
Application Number:
JP2006060511A
Publication Date:
August 15, 2012
Filing Date:
March 07, 2006
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
C30B29/04
Domestic Patent References:
| JP2004503461A | ||||
| JP2003277183A | ||||
| JP2005225746A |
Foreign References:
| WO2004046427A1 |
Attorney, Agent or Firm:
Masami Sakai
Norio Kagami
Jun Komatsu
Hidetake Komatsu
Norio Kagami
Jun Komatsu
Hidetake Komatsu