Title:
層間絶縁用薄膜
Document Type and Number:
Japanese Patent JP5004866
Kind Code:
B2
Inventors:
Hiroyuki Hanabata
King treasure
King treasure
Application Number:
JP2008128470A
Publication Date:
August 22, 2012
Filing Date:
May 15, 2008
Export Citation:
Assignee:
ASAHI KASEI KABUSHIKI KAISHA
International Classes:
H01L21/312; H01L21/768; H01L23/532
Domestic Patent References:
| JP2002030249A | ||||
| JP2001226171A |
Foreign References:
| WO2000012640A1 |
Attorney, Agent or Firm:
Hideo Takei
Yoshio Narui
Yoshiaki Matsui
Yoshio Narui
Yoshiaki Matsui