Title:
電子部品の実装ツール、実装装置
Document Type and Number:
Japanese Patent JP5005403
Kind Code:
B2
Inventors:
Yasuo Iwaki
Application Number:
JP2007082347A
Publication Date:
August 22, 2012
Filing Date:
March 27, 2007
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
H01L21/52
Domestic Patent References:
| JP2005150311A | ||||
| JP2007311465A | ||||
| JP2006165188A | ||||
| JP2002334905A |
Attorney, Agent or Firm:
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto