Title:
角速度についての振動マイクロ-メカニカルセンサー
Document Type and Number:
Japanese Patent JP5006208
Kind Code:
B2
Abstract:
Oscillating micro-mechanical angular velocity sensor has bending springs (11) that connect the seismic masses (1,2) connected to each other. The seismic masses are connected to the support areas using springs or auxiliary structures.
Inventors:
Bromkuvist, Anssi
Application Number:
JP2007548849A
Publication Date:
August 22, 2012
Filing Date:
December 30, 2005
Export Citation:
Assignee:
VTE Technologies, Inc.
International Classes:
G01C19/574; G01C19/56
Domestic Patent References:
| JP2002515976A | ||||
| JP2002296038A |
Foreign References:
| WO2004102637A1 | ||||
| US6294400 | ||||
| US20040250620 | ||||
| WO2005043079A1 |
Attorney, Agent or Firm:
Takashima Ichi