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Patent Searching and Data


Title:
蒸着装置、成膜方法
Document Type and Number:
Japanese Patent JP5008527
Kind Code:
B2
Inventors:
根岸 敏夫
Application Number:
JP2007280726A
Publication Date:
August 22, 2012
Filing Date:
October 29, 2007
Export Citation:
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Assignee:
株式会社アルバック
International Classes:
H05B33/10; C23C14/24; H01L51/50
Domestic Patent References:
JP10195641A
JP2005330537A
JP2006185593A
JP2001308082A
Attorney, Agent or Firm:
石島 茂男
阿部 英樹