Title:
インプリント方法及びインプリント装置、インプリント方法を用いた部材の製造方法
Document Type and Number:
Japanese Patent JP5020844
Kind Code:
B2
Abstract:
An imprint method for imprinting an imprint pattern provided to a mold onto a pattern forming layer formed on a substrate is constituted by a first step of effecting alignment between the substrate and the mold with feedback control; a second step of bringing the mold and the pattern forming layer into contact with each other; a third step of curing the pattern forming layer; and a fourth step of increasing a gap between the substrate and the mold. The imprint method further includes a step of stopping the feedback control between the first step and the second step and/or between the second step and the third step.
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Inventors:
Okushima Shingo
Junichi Seki
Nobuto Suehira
Kazuyuki Harumi
Junichi Seki
Nobuto Suehira
Kazuyuki Harumi
Application Number:
JP2008024802A
Publication Date:
September 05, 2012
Filing Date:
February 05, 2008
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; B29C59/02
Domestic Patent References:
| JP2005533393A | ||||
| JP2007140460A | ||||
| JP2006516065A | ||||
| JP2006165371A |
Attorney, Agent or Firm:
Tatsuya Nagao