Title:
パターン露光方法及び装置
Document Type and Number:
Japanese Patent JP5036351
Kind Code:
B2
Inventors:
Haruhiko Miyamoto
Eiji Suzuki
Toshi Mino
Eiji Suzuki
Toshi Mino
Application Number:
JP2007056144A
Publication Date:
September 26, 2012
Filing Date:
March 06, 2007
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/20; G03F1/00; G03F1/54; H01L21/027
Domestic Patent References:
| JP2002014464A | ||||
| JP2006317737A | ||||
| JP4073766A | ||||
| JP2006098488A |
Attorney, Agent or Firm:
Kazunori Kobayashi
Shigeru Iijima
Kobayashi Hideyoshi
Shigeru Iijima
Kobayashi Hideyoshi