Title:
フッ素ガスの供給方法およびその装置
Document Type and Number:
Japanese Patent JP5037021
Kind Code:
B2
Inventors:
Yasuyuki Hoshino
Masakazu Oka
Masakazu Oka
Application Number:
JP2006039360A
Publication Date:
September 26, 2012
Filing Date:
February 16, 2006
Export Citation:
Assignee:
SHOWA DENKO K.K.
International Classes:
C01B7/20; H01L21/205; C23C16/44
Domestic Patent References:
| JP5502981A | ||||
| JP2003081614A | ||||
| JP2003327412A |
Attorney, Agent or Firm:
Patent corporation ssinpat
Koji Makimura
Chihata Takahata
Toru Suzuki
Koji Makimura
Chihata Takahata
Toru Suzuki