Title:
真空適用のための空気静力学的にガイドされたテーブル装置
Document Type and Number:
Japanese Patent JP5050037
Kind Code:
B2
Abstract:
The table system (1) has a base plate (2) and a moving table guided by aerostatic bearing units (10). The aerostatic bearing units are constructed partially as swivel joints, where a push rod (4) which is actuated by a drive (5) for guiding the moving table laterally is connected to the rotating part of each swivel joint, and in that the push rods are hollow and constitute a component part of the suction lines for extracting the operating gas.
Inventors:
Gerhard Schubert
Christian yackel
Wolf Karsten Kirschstein
Michael behm
Rene Bauer
Gerd Harnish
Thomas pechel
Stephan lycee
Christoph Schenck
Christian yackel
Wolf Karsten Kirschstein
Michael behm
Rene Bauer
Gerd Harnish
Thomas pechel
Stephan lycee
Christoph Schenck
Application Number:
JP2009258908A
Publication Date:
October 17, 2012
Filing Date:
November 12, 2009
Export Citation:
Assignee:
Vistec Electron Beam Game Beamer
International Classes:
F16C32/06; G12B5/00
Domestic Patent References:
| JP2000240651A | ||||
| JP2002252166A |
Foreign References:
| US20080166213 |
Attorney, Agent or Firm:
Fujita Akira
Hideki Imai
Hideki Imai