Title:
水中耐剥離性に優れた炭素系二層膜の製造方法
Document Type and Number:
Japanese Patent JP5055535
Kind Code:
B2
Abstract:
To provide a method for manufacturing a carbon film excellent in a peeling resistant property under water without providing an intermediate layer.
The method for manufacturing a carbon-based two-layered film comprises forming a film softer than a primary carbon film onto the surface of the primary carbon film. The softer film can be formed by mixing Si, Ti, Cr, Ni or Co into a carbon film, or by containing more hydrogen per mass than the primary carbon film. The carbon-based two-layered film manufactured by this method can be used as a solid lubricating film for a mechanical part that is used under water.
COPYRIGHT: (C)2005,JPO&NCIPI
Inventors:
Tsuneyori Ohana
Akihiro Tanaka
Yoshinori Koga
Masahiro Suzuki
Nakamura Ryoko
Akihiro Tanaka
Yoshinori Koga
Masahiro Suzuki
Nakamura Ryoko
Application Number:
JP2003304097A
Publication Date:
October 24, 2012
Filing Date:
August 28, 2003
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
B32B9/04; C10M103/02; C10M105/76; C10M177/00; C10N10/08; C10N10/12; C10N10/16; C10N20/00; C10N30/00; C10N50/08; C10N70/00
Domestic Patent References:
| JP200164005A |