Title:
プラズマ処理方法
Document Type and Number:
Japanese Patent JP5063535
Kind Code:
B2
Inventors:
Naoki Yasui
Kenichi Kuwahara
Yutaka Takazuma
Kenichi Kuwahara
Yutaka Takazuma
Application Number:
JP2008221413A
Publication Date:
October 31, 2012
Filing Date:
August 29, 2008
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01L21/3065; G03F7/40; H01L21/027
Domestic Patent References:
| JP2008159717A | ||||
| JP2008033174A | ||||
| JP4071222A | ||||
| JP2007329505A | ||||
| JP2007150166A | ||||
| JP2006066408A |
Foreign References:
| WO2008059440A1 |
Attorney, Agent or Firm:
Patent Business Corporation Daiichi International Patent Office