Title:
マイクロリソグラフィ投影露光装置の照明システム
Document Type and Number:
Japanese Patent JP5066611
Kind Code:
B2
Inventors:
Fiorca damian
Waldorf Daniel
Zenger Ingo
Waldorf Daniel
Zenger Ingo
Application Number:
JP2010524477A
Publication Date:
November 07, 2012
Filing Date:
September 10, 2008
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
H01L21/027; G02B5/30; G02B19/00; G02B30/25; G03F7/20
Domestic Patent References:
| JP2007227918A | ||||
| JP2006005319A | ||||
| JP2006085071A | ||||
| JP2007189079A | ||||
| JP2007053390A | ||||
| JP2002062582A | ||||
| JP2004157219A | ||||
| JP2006191064A | ||||
| JP2006196715A | ||||
| JP2007506262A |
Foreign References:
| WO2005124420A1 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi