Title:
基板ウエハの汚染を監視するための方法および装置
Document Type and Number:
Japanese Patent JP5068466
Kind Code:
B2
Abstract:
The device has a gas analyzer (2) comprising ionizing and identifying units. An adapter (5) connects a front opening universal pod or standard mechanical interface type transport enclosure (1) containing inert gas e.g. nitrogen, with a pipe (3). The pipe sucks the gas from the enclosure and conveys the gas until an inlet of the analyzer. The ionizing unit ionizes the gas at atmospheric pressure and the identifying unit identifies the ionized gas by the measurement of a parameter of ions obtained through ionization. An independent claim is also included for: a method for controlling contamination of wafers or other parts.
Inventors:
Arnaud Fouble
Remi solo
Xavier Meteor
Jean-Pierre Desbiol
Remi solo
Xavier Meteor
Jean-Pierre Desbiol
Application Number:
JP2006072120A
Publication Date:
November 07, 2012
Filing Date:
March 16, 2006
Export Citation:
Assignee:
Adexen Baquium Product
International Classes:
H01L21/677; G01N27/623
Domestic Patent References:
| JP2004259538A |
Attorney, Agent or Firm:
Kawaguchi International Patent Office