Title:
プラズマ処理装置、プラズマ処理装置の製造方法
Document Type and Number:
Japanese Patent JP5069137
Kind Code:
B2
Inventors:
Hideo Takei
Satoru Ikeda
Masashi Kikuchi
Hideyuki Small
Satoru Ikeda
Masashi Kikuchi
Hideyuki Small
Application Number:
JP2008010496A
Publication Date:
November 07, 2012
Filing Date:
January 21, 2008
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
H01L21/3065; H01L21/31
Domestic Patent References:
| JP2004190136A | ||||
| JP2006002170A | ||||
| JP2002249864A | ||||
| JP2263972A | ||||
| JP7273053A |
Attorney, Agent or Firm:
Shigeo Ishijima
Hideki Abe
Hideki Abe