Title:
マルチターゲットスパッタリング装置
Document Type and Number:
Japanese Patent JP5075662
Kind Code:
B2
Inventors:
Taihei Takahashi
Application Number:
JP2008032551A
Publication Date:
November 21, 2012
Filing Date:
February 14, 2008
Export Citation:
Assignee:
Eiko Engineering Co., Ltd.
International Classes:
C23C14/34; H01L21/285
Domestic Patent References:
| JP2002256425A | ||||
| JP2003247061A |
Attorney, Agent or Firm:
Kazuyoshi Hojo