Title:
環状静電容量式圧力センサ
Document Type and Number:
Japanese Patent JP5079492
Kind Code:
B2
Abstract:
A pressure sensor for measuring a pressure of a process fluid includes a vessel, an electrode and a diaphragm. The vessel receives the process fluid. The electrode is integral with an inner wall of the vessel. The diaphragm extends at least partially over the electrode and is configured to move relative to the electrode in response to the pressure of the process fluid. An electrical capacitance between the electrode and the diaphragm is related to the pressure of the process fluid.
Inventors:
Schumacher, Mark S
Application Number:
JP2007503914A
Publication Date:
November 21, 2012
Filing Date:
February 23, 2005
Export Citation:
Assignee:
Rosemount Incorporated
International Classes:
G01F1/36; G01L13/06; G01F1/38; G01L9/00; G01L19/00
Domestic Patent References:
| JP6507829A | ||||
| JP11083655A | ||||
| JP2001124642A | ||||
| JP10335675A | ||||
| JP7149121A | ||||
| JP62259016A |
Foreign References:
| US4141252 |
Attorney, Agent or Firm:
Hajime Tsukuni
Fumio Shinoda
Fumio Shinoda