Title:
静電動作装置
Document Type and Number:
Japanese Patent JP5081833
Kind Code:
B2
Abstract:
An electrostatic acting device in which leakage of charge from an electret film is suppressed. The electrostatic acting device comprises a movable electrode section (20) having a movable electrode (22), a fixed electrode section (10) having an electret film (12) opposed to the movable section (20) at a predetermined distance and capable of storing charge and a conductive layer (14) formed on a predetermined region on the upper surface of the electret film (12), and an insulating film (13) interposed between the electret film (12) and the conductive layer (14).
Inventors:
Naruse Yoko
Yoshishi Shishida
Naoki Matsubara
Murayama Yoshiki
Yoshishi Shishida
Naoki Matsubara
Murayama Yoshiki
Application Number:
JP2008542077A
Publication Date:
November 28, 2012
Filing Date:
October 26, 2007
Export Citation:
Assignee:
Sanyo Electric Co., Ltd.
International Classes:
H02N1/00
Domestic Patent References:
JP2006180450A | 2006-07-06 | |||
JP2006245398A | 2006-09-14 | |||
JPH02219478A | 1990-09-03 | |||
JPH02285978A | 1990-11-26 | |||
JPH04112683A | 1992-04-14 | |||
JP2009081950A | 2009-04-16 | |||
JP2009055736A | 2009-03-12 |
Attorney, Agent or Firm:
Hirokazu Miyazono