Title:
ワーク吸着移送システムにおける給排気制御装置
Document Type and Number:
Japanese Patent JP5086771
Kind Code:
B2
Inventors:
Arima Kiku Toku
Husukemura Daisuke
Husukemura Daisuke
Application Number:
JP2007275955A
Publication Date:
November 28, 2012
Filing Date:
October 24, 2007
Export Citation:
Assignee:
I&T Co., Ltd.
International Classes:
B25J15/06; B65G47/91; B65G49/06; F04B37/16
Domestic Patent References:
| JP10146783A | ||||
| JP2004009253A | ||||
| JP59073293A | ||||
| JP6032585A |
Attorney, Agent or Firm:
Kitao Matsuura
Yasutoshi Iwata
Yu Yamamoto
Yasutoshi Iwata
Yu Yamamoto