Title:
トランスデューサ型真空計及びその制御方法
Document Type and Number:
Japanese Patent JP5088814
Kind Code:
B2
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Inventors:
Chiba Takahiro
Application Number:
JP2007110064A
Publication Date:
December 05, 2012
Filing Date:
April 19, 2007
Export Citation:
Assignee:
Daia Vacuum Co., Ltd.
International Classes:
G01L21/00; F04B37/16
Domestic Patent References:
JP9178593A | ||||
JP3115661U | ||||
JP4133047A | ||||
JP2003097427A |
Attorney, Agent or Firm:
Kinoshita Shigeru