Title:
シート貼付装置及び貼付方法
Document Type and Number:
Japanese Patent JP5093852
Kind Code:
B2
Inventors:
Takahisa Yoshioka
Yoshiaki Sugishita
Yoshiaki Sugishita
Application Number:
JP2008320586A
Publication Date:
December 12, 2012
Filing Date:
December 17, 2008
Export Citation:
Assignee:
LINTEC CORPORATION
International Classes:
H01L21/683; B26D3/10
Domestic Patent References:
| JP2008078287A | ||||
| JP2006102822A |
Attorney, Agent or Firm:
Yoshio Yamaguchi