Title:
液滴塗布装置
Document Type and Number:
Japanese Patent JP5096106
Kind Code:
B2
Inventors:
Akihiro Shigeyama
Application Number:
JP2007282168A
Publication Date:
December 12, 2012
Filing Date:
October 30, 2007
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
B05C11/10; B05C5/00; B41J2/165
Domestic Patent References:
| JP2006334963A | ||||
| JP2006272791A | ||||
| JP2005028758A | ||||
| JP2006181410A |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu