真直度測定方法及び真直度測定装置

Japanese Patent JP5100613

B2

The present invention provides a straightness measuring method. The straightness measuring method can calculate a surface profile of an object to be measured without performing zero point adjustments to three displacement meters at high precision. The method comprises: measuring distances from three displacement meters, which are arranged in a first direction and fixed in relative positions therebetween, to three measuring points arranged along a measurement line that extends in the first direction on a surface of an object to be measured while the three displacement meters are opposed to the object to be measured while moving a movable body relative to a stationary body in the first direction, the moving body being either the three displacement meters or the object to be measured and the stationary body being the other one; based on the measurement results of the three displacement meters, calculating a locus of a reference point fixed to the movable body as a profile of a locus curve; based on a quadratic component of a profile of a pre-measured locus curve, performing calibration to a quadratic component of the profile calculated by the locus curve; and based on the profile of the calibrated locus curve, calculating the surface profile of the object to be measured.

Kiyota Yoshinaga
Koichi Ichihara

JP2008277597A

December 19, 2012

October 29, 2008

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Sumitomo Heavy Industries Ltd.

G01B21/30

JP61139712A
JP64047905A
JP1107105A
JP7103751A

Mikio Kuruyama
Keishiro Takahashi
Ukai Shinichi

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