Title:
基板収容容器およびその位置決め構造
Document Type and Number:
Japanese Patent JP5103596
Kind Code:
B2
Inventors:
Tetsuyoshi Toyota
Mori Shoichi
Mori Shoichi
Application Number:
JP2008269215A
Publication Date:
December 19, 2012
Filing Date:
October 17, 2008
Export Citation:
Assignee:
Hirata Kiko Co., Ltd.
International Classes:
H01L21/673; B65D85/86; H01L21/68
Domestic Patent References:
| JP2001284430A | ||||
| JP200564279A | ||||
| JP4133442U | ||||
| JP200810574A | ||||
| JP9107019A | ||||
| JP200021966A | ||||
| JP541178A |
Attorney, Agent or Firm:
Inoue Motohiro