Title:
飛散粒子除去装置、飛散粒子の低減方法、光源装置、露光装置及び電子デバイスの製造方法
Document Type and Number:
Japanese Patent JP5104095
Kind Code:
B2
Inventors:
Atsushi Yamada
Application Number:
JP2007193346A
Publication Date:
December 19, 2012
Filing Date:
July 25, 2007
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP2006080255A | ||||
| JP2008277481A | ||||
| JP2006079868A | ||||
| JP11150080A | ||||
| JP7226394A | ||||
| JP2007517396A | ||||
| JP2006191057A | ||||
| JP2006186373A |
Attorney, Agent or Firm:
Furuya Fumio
Toshihide Mori
Toshihide Mori
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