Title:
基板貼り合せシステム
Document Type and Number:
Japanese Patent JP5104257
Kind Code:
B2
Inventors:
Takuya Kaizu
Hiroaki Takeda
Hiroaki Takeda
Application Number:
JP2007312182A
Publication Date:
December 19, 2012
Filing Date:
December 03, 2007
Export Citation:
Assignee:
Hitachi Plant Technology Co., Ltd.
International Classes:
G02F1/1339; G02F1/13; G02F1/1341
Domestic Patent References:
| JP2006154166A | ||||
| JP2007121474A | ||||
| JP2007241152A | ||||
| JP7183354A |
Attorney, Agent or Firm:
Polaire Patent Business Corporation