Title:
マイクロリソグラフィ投影露光装置の照明システム
Document Type and Number:
Japanese Patent JP5112455
Kind Code:
B2
Abstract:
The lighting device has a depolarizer (10) causes a linear polarized light in connection with a light mixture system following light direction of propagation in an effective depolarization on the depolarizer. A micro lens array (20) is arranged in light direction of propagation before the light mixture system, where multiple micro lenses (20a to 20e) are arranged with a periodicity. The depolarizer is formed in such a manner that by reciprocal effect of the depolarizer with the periodicity of the micro lens array results in remainder polarization distribution to a maximum polarization degree. Independent claims are also included for the following: (1) a method for micro lithographic production of micro-structured element (2) a micro-structured element.
Inventors:
Fiorca damian
Mullman Freight
Schwab Marx
Zeitz Wolfgang
Ditman Olaf
Mullman Freight
Schwab Marx
Zeitz Wolfgang
Ditman Olaf
Application Number:
JP2009552076A
Publication Date:
January 09, 2013
Filing Date:
October 01, 2007
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
H01L21/027; G02B3/00; G02B5/30; G02B19/00; G03F7/20
Domestic Patent References:
| JP3016114A | ||||
| JP2006269853A | ||||
| JP2001284228A | ||||
| JP2002520810A |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Yoshinori Kishi
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Yoshinori Kishi