Title:
加速度センサならびにセンサチップおよびその製造方法
Document Type and Number:
Japanese Patent JP5112659
Kind Code:
B2
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Inventors:
Goro Nakatani
Fuwa Yasuhiro
Fuwa Yasuhiro
Application Number:
JP2006219610A
Publication Date:
January 09, 2013
Filing Date:
August 11, 2006
Export Citation:
Assignee:
ROHM Co., Ltd.
International Classes:
G01P15/12; G01P15/08; H01L29/84
Domestic Patent References:
| JP2005180930A | ||||
| JP2001227902A | ||||
| JP2006145546A | ||||
| JP2003297874A | ||||
| JP3120721U | ||||
| JP5087649A |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Kyoumura Junji
Mio Kawasaki
Kyoumura Junji