Title:
検査装置及び欠陥検査方法
Document Type and Number:
Japanese Patent JP5114808
Kind Code:
B2
Inventors:
Hirokazu Seki
Kenji Koremura
Torizawa
Masanori Kobayashi
Todoroki Toshiyuki
Kenji Koremura
Torizawa
Masanori Kobayashi
Todoroki Toshiyuki
Application Number:
JP2012106055A
Publication Date:
January 09, 2013
Filing Date:
May 07, 2012
Export Citation:
Assignee:
Lasertec Co., Ltd.
International Classes:
H01L21/66; G01B11/00; G01B11/30
Domestic Patent References:
| JP2007318031A | ||||
| JP2002365236A | ||||
| JP2010027915A | ||||
| JP2011027427A | ||||
| JP2006147848A |
Attorney, Agent or Firm:
Kenjiro Oyama