To provide a method for easily and precisely inspecting polarization characteristic distribution and a failure of a ferroelectric material in a wafer size.
In the method of inspecting a ferroelectric substance, polarization reversal occurs by first polarization reversal voltage and second polarization reversal voltage whose pole is different from first polarization reversal voltage. The method includes: a first step of applying voltage which has the same pole as first polarization reversal voltage and whose absolute value is not less than that of first polarization reversal voltage to the ferroelectric substance, and polarizing the ferroelectric substance; a second step of applying voltage between voltage which has the same pole as first polarization reversal voltage and is smaller than the absolute value of first polarization reversal voltage, and voltage which has the same pole as second polarization reversal voltage and is smaller than the absolute value of second polarization reversal voltage to the ferroelectric substance; and a third step of applying voltage which has the same pole as second polarization reversal voltage, and whose absolute value is not less than that of second polarization reversal voltage to the ferroelectric substance. A polarization measuring step of heating the ferroelectric substance and measuring the polarization characteristic by pyroelectricity of the ferroelectric substance is performed after the first to third steps.
COPYRIGHT: (C)2008,JPO&INPIT
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Ishibashi Masayuki
Masaaki Ogata