Title:
電離真空計
Document Type and Number:
Japanese Patent JP5127042
Kind Code:
B2
Abstract:
An ionization vacuum gauge which has at least three electrodes of a grid (2), an electron source (3) and an ion collector (1) in a vacuum vessel(4) connected in communication with a vacuum apparatus, oscillates electrons emitted from the electron source (3) within and outside of the grid (2), ionizes gas molecules flying into the grid (2) by the oscillated electrons, supplements the ionized ions by the ion collector (1) to convert into a current signal, and measures a gas molecular density (pressure) in the vacuum apparatus according to the obtained current intensity, wherein the ion collector (1) is provided with heating means for heating the ion collector.
Inventors:
Fumio Watanabe
Watanabe Excitation
Watanabe Excitation
Application Number:
JP2007528344A
Publication Date:
January 23, 2013
Filing Date:
May 08, 2006
Export Citation:
Assignee:
Ampere Co., Ltd.
International Classes:
G01L21/32
Domestic Patent References:
| JPH01143928A | 1989-06-06 | |||
| JPS6249232A | 1987-03-03 | |||
| JP2000039375A | 2000-02-08 | |||
| JP2001215163A | 2001-08-10 | |||
| JPH01143928A | 1989-06-06 |
Foreign References:
| WO2004011895A1 | 2004-02-05 |
Attorney, Agent or Firm:
Masazumi Mori
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