Title:
薄膜光電変換素子と薄膜光電変換素子の製造方法
Document Type and Number:
Japanese Patent JP5147935
Kind Code:
B2
Abstract:
A thin film photoelectric conversion device for performing photoelectric conversion of a wide range of light, from the visible range to the infrared range, is provided. A plasmon resonance phenomenon, which enhances a photo-induced electric field, is caused in a wide range of light, by a metal nanostructure which is formed by annealing a substrate on which a first metal thin film layer composed of a first metal and a second metal thin film layer composed of a second metal which is partially overlapped onto the first metal thin film layer are laminated, and in which a periodic structure, wherein a number of first convex parts successively lie with a pitch of from one-tenth of a wavelength of an incident light to a wavelength equal to or shorter than the wavelength of the incident light in a planar direction along the substrate, is formed on the surface of the substrate; and a random structure, wherein a distance between any pair of a number of second convex parts formed at random positions on the substrate, or a distance between a second convex part and a first convex part is shorter than 100 nm, is formed on the substrate in a position within a region of the periodic structure or in a position adjacent to the region of the periodic structure, and as a result, high sensitivity photo-induced current is generated
Inventors:
Brisenyo Hoyo
Application Number:
JP2010503157A
Publication Date:
February 20, 2013
Filing Date:
December 10, 2008
Export Citation:
Assignee:
nusola corporation
International Classes:
H01L31/08; H01L21/28; H01L31/09; H01L31/04; H01L31/18
Domestic Patent References:
| JPH05322646A | 1993-12-07 | |||
| JPH06151809A | 1994-05-31 | |||
| JPH11251241A | 1999-09-17 | |||
| JP2006278878A | 2006-10-12 | |||
| JP2007096136A | 2007-04-12 | |||
| JPH09510832A | 1997-10-28 | |||
| JPH06147993A | 1994-05-27 | |||
| JPH01160010A | 1989-06-22 | |||
| JPH05322646A | 1993-12-07 | |||
| JPH06151809A | 1994-05-31 | |||
| JPH11251241A | 1999-09-17 | |||
| JP2006278878A | 2006-10-12 | |||
| JP2007096136A | 2007-04-12 | |||
| JPH09510832A | 1997-10-28 |
Foreign References:
| WO2006085670A1 | 2006-08-17 | |||
| WO2006095381A1 | 2006-09-14 | |||
| WO2006085670A1 | 2006-08-17 | |||
| WO2006095381A1 | 2006-09-14 |
Attorney, Agent or Firm:
Osamu Hayasaki