Title:
希土類酸化物含有溶射基板及び積層板
Document Type and Number:
Japanese Patent JP5154141
Kind Code:
B2
Inventors:
Noriaki Hamatani
Koji Nakamura
Ryoji Iida
Koji Nakamura
Ryoji Iida
Application Number:
JP2007133669A
Publication Date:
February 27, 2013
Filing Date:
May 21, 2007
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C23C4/10; B32B15/04; C04B41/88; C23C4/18
Domestic Patent References:
| JP2005139554A | ||||
| JP20043022A | ||||
| JP2006214000A | ||||
| JP2001207252A | ||||
| JP2007100143A | ||||
| JP2007100142A |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa