Title:
クロロシラン類含有ガスの水素還元方法およびクロロシラン類の水素還元用装置
Document Type and Number:
Japanese Patent JP5155708
Kind Code:
B2
Inventors:
Satoshi Wakamatsu
Yoshinori Tagashi
Yoshinori Tagashi
Application Number:
JP2008075360A
Publication Date:
March 06, 2013
Filing Date:
March 24, 2008
Export Citation:
Assignee:
Tokuyama Corporation
International Classes:
C01B33/03
Domestic Patent References:
| JP2005008430A | ||||
| JP2003002627A | ||||
| JP2003095635A |
Foreign References:
| WO2006016626A1 |
Attorney, Agent or Firm:
Patent corporation ssinpat
Koji Makimura
Chihata Takahata
Koji Makimura
Chihata Takahata
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