Title:
光照射装置
Document Type and Number:
Japanese Patent JP5157945
Kind Code:
B2
Inventors:
Masashi Shinbori
Suzuki Kazuyoshi
Suzuki Kazuyoshi
Application Number:
JP2009027048A
Publication Date:
March 06, 2013
Filing Date:
February 09, 2009
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
| JP2002246297A | ||||
| JP2008281837A | ||||
| JP2005108892A | ||||
| JP7153674A | ||||
| JP5127086A | ||||
| JP2002237442A | ||||
| JP2000277409A | ||||
| JP2000250226A |
Foreign References:
| WO2000057459A1 | ||||
| WO2000057126A1 |
Attorney, Agent or Firm:
Shunichiro Nagasawa