Title:
露光装置、露光方法及びデバイス製造方法
Document Type and Number:
Japanese Patent JP5158178
Kind Code:
B2
Inventors:
Naoyuki Kobayashi
Soichi Yamato
Shigeru Hirukawa
Yasuhiro Omura
Soichi Yamato
Shigeru Hirukawa
Yasuhiro Omura
Application Number:
JP2010255402A
Publication Date:
March 06, 2013
Filing Date:
November 15, 2010
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP5042804B2 | ||||
| JP5129181A | ||||
| JP9232213A | ||||
| JP9260262A | ||||
| JP10154659A | ||||
| JP10303114A | ||||
| JP11135407A | ||||
| JP2000323406A | ||||
| JP2001110722A | ||||
| JP2002231622A | ||||
| JP2005197384A |
Foreign References:
| WO1999049504A1 |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Kazuya Nishi
Tadashi Takahashi
Kazuya Nishi