Title:
プラズマCVD装置のシャワー電極の製作方法
Document Type and Number:
Japanese Patent JP5158367
Kind Code:
B2
Inventors:
Higashi Masahisa
Ryudai Taguchi
Daisuke Oka
Ryudai Taguchi
Daisuke Oka
Application Number:
JP2008308557A
Publication Date:
March 06, 2013
Filing Date:
December 03, 2008
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
C23C16/44; C23C16/455; H01L21/31; H05H1/46
Domestic Patent References:
| JP2004079961A | ||||
| JP8144060A | ||||
| JP2007053231A | ||||
| JP9069514A | ||||
| JP2004079960A | ||||
| JP2004006211A |
Attorney, Agent or Firm:
Akio Shionoiri