冷陰極電離真空計 - Daia Vacuum Co., Ltd.

Title:

冷陰極電離真空計

Document Type and Number:

Japanese Patent JP5170768

Kind Code:

B2

Inventors:

Chiba Takahiro
Yoshiaki Kawai
Yuji Takamiya
Atsushi Wakamori
Toru Yokoyama

Application Number:

JP2008319717A

Publication Date:

March 27, 2013

Filing Date:

December 16, 2008

Export Citation:

Assignee:

Daia Vacuum Co., Ltd.

International Classes:

G01L21/34

Domestic Patent References:

Attorney, Agent or Firm:

Kinoshita Shigeru

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