ウエハ加工用テープ - THE FURUKAW ELECTRIC CO.,LTD.

Title:

ウエハ加工用テープ

Document Type and Number:

Japanese Patent JP5184409

Kind Code:

B2

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Inventors:

Gold and tin
Shinichi Ishiwata
Yasumasa Morishima
Masami Aoyama
Kunihiko Ishiguro
Toshihiro Suzuki
Takanori Yamakawa

Application Number:

JP2009068316A

Publication Date:

April 17, 2013

Filing Date:

March 19, 2009

Export Citation:

Assignee:

THE FURUKAW ELECTRIC CO.,LTD.

International Classes:

H01L21/301; C09J7/02; C09J201/00

Domestic Patent References:

Attorney, Agent or Firm:

Ryo Matsushita

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