Title:
静電チャック、及びその製造方法
Document Type and Number:
Japanese Patent JP5201527
Kind Code:
B2
Abstract:
An electrostatic chuck of a stack structure includes a metal layer interposed between insulating layers and a groove formed at a peripheral portion of the electrostatic chuck to have a thickness gradually increasing toward an outside, the groove being covered with a thermally sprayed insulating film. The thermally sprayed film covers at least a portion of the metal layer exposed at an inside of the groove such that the thermally sprayed film does not protrude from the groove.
Inventors:
Go Hida
Takashi Yamamoto
Takashi Yamamoto
Application Number:
JP2008085417A
Publication Date:
June 05, 2013
Filing Date:
March 28, 2008
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C4/10; C23C4/18; H01L21/3065
Domestic Patent References:
| JP6279974A | ||||
| JP2008028052A | ||||
| JP2004103648A | ||||
| JP2003264223A | ||||
| JP2003321760A |
Attorney, Agent or Firm:
Masao Tanaka