Title:
光学素子保持装置、光学系、露光装置、デバイスの製造方法
Document Type and Number:
Japanese Patent JP5206132
Kind Code:
B2
Inventors:
Tetsuya Oshino
Masayuki Shiraishi
Masayuki Shiraishi
Application Number:
JP2008148118A
Publication Date:
June 12, 2013
Filing Date:
June 05, 2008
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G02B7/02; G02B7/198; G02B17/00; G02B19/00; G03F7/20
Domestic Patent References:
JP2005086031A | ||||
JP2007201342A | ||||
JP2005276933A | ||||
JP2004001821A1 | ||||
JP2004031491A |
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda
Makoto Onda