Title:
基板載置台及び基板処理装置
Document Type and Number:
Japanese Patent JP5207996
Kind Code:
B2
Inventors:
Makabe Akiyuki
Takeshi Okagi
Takeshi Okagi
Application Number:
JP2009010282A
Publication Date:
June 12, 2013
Filing Date:
January 20, 2009
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/683; H01L21/205; H01L21/3065; H01L21/31
Domestic Patent References:
| JP6181186A | ||||
| JP98114A | ||||
| JP955420A | ||||
| JP200022060A | ||||
| JP2003257958A | ||||
| JP200463779A |
Attorney, Agent or Firm:
Hiroaki Oyama