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Title:
芳香族縮合環を含有する樹脂を含むリソグラフィー用レジスト下層膜形成組成物
Document Type and Number:
Japanese Patent JP5212666
Kind Code:
B2
Inventors:
藤谷 徳昌
新城 徹也
Application Number:
JP2010508248A
Publication Date:
June 19, 2013
Filing Date:
April 16, 2009
Export Citation:
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Assignee:
日産化学工業株式会社
International Classes:
G03F7/11; C08F212/02; C08F226/12; C08F232/08; G03F7/40; H01L21/027
Domestic Patent References:
JP2005250434A
JP2005015532A
Foreign References:
WO2005013601A1
Attorney, Agent or Firm:
萼 経夫
宮崎 嘉夫
加藤 勉
小山 京子



 
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