Title:
縦型MOSFETの製造方法
Document Type and Number:
Japanese Patent JP5236281
Kind Code:
B2
Inventors:
Masahiro Niisato
Application Number:
JP2007336781A
Publication Date:
July 17, 2013
Filing Date:
December 27, 2007
Export Citation:
Assignee:
LAPIS Semiconductor Co., Ltd.
International Classes:
H01L29/78; H01L21/336; H01L29/12
Domestic Patent References:
| JP57153469A | ||||
| JP7034471B2 | ||||
| JP2000286415A | ||||
| JP2000243957A | ||||
| JP2000150866A |
Attorney, Agent or Firm:
Motohiko Fujimura
Shigeyuki Nagaoka
Shinji Takano
Shigeyuki Nagaoka
Shinji Takano