Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
膨張黒鉛シートの使用方法及びシリコンの製造方法
Document Type and Number:
Japanese Patent JP5237189
Kind Code:
B2
More Like This:
JP5635524A device that coats a substrate using chemical vapor deposition
WO/2014/191899METHOD FOR MANUFACTURING A SILICON CYLINDER BY GROWTH ON SEEDS IN A DIRECTED SOLIDIFICATION FURNACE
JP6604338Silicon single crystal pulling condition calculation program, silicon single crystal hot zone improvement method, and silicon single crystal growth method
Inventors:
Hirose Yoshiaki
Yuki tetsuya
Application Number:
JP2009115019A
Publication Date:
July 17, 2013
Filing Date:
May 11, 2009
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
Toyo Tanso Co., Ltd.
International Classes:
C30B29/06; C04B35/52; C30B15/10
Domestic Patent References:
JP2528285B2
JP2620606B2
Attorney, Agent or Firm:
Yoshiyuki Kaji
Makoto Suhara



 
Previous Patent: JPS5237188

Next Patent: RESPIRATION TUNING TYPE GAS SUPPLYING DEVICE