Title:
照明光学系、これを用いた露光装置及びデバイス製造方法
Document Type and Number:
Japanese Patent JP5241270
Kind Code:
B2
Abstract:
An illumination optical system includes a pair of fly-eye mirrors configured to receive light from a light source, a first condenser configured to condense light from the pair of fly-eye mirrors, a reflection type integrator configured to receive light from the first condenser, the reflection type integrator including a plurality of cylindrical reflective surfaces having parallel generating line directions, an aperture stop arranged perpendicular to the generating line direction, and a second condenser configured to superpose on an illuminated surface luminous fluxes from a plurality of cylindrical reflective surfaces of the reflection type integrator.
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Inventors:
Kazuhiko Kajiyama
Application Number:
JP2008045504A
Publication Date:
July 17, 2013
Filing Date:
February 27, 2008
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
JP2003309057A | ||||
JP2005141158A | ||||
JP11312638A | ||||
JP7235470A | ||||
JP2007234717A |
Attorney, Agent or Firm:
Ryosuke Fujimoto
Atsushi Mizumoto
Atsushi Mizumoto
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