Title:
真空圧力測定装置
Document Type and Number:
Japanese Patent JP5252739
Kind Code:
B2
Abstract:
A vacuum pressure measuring device with an electron source has a reaction zone for forming ions by impact ionization, wherein the electron source communicates with the reaction zone via a passage for the electrons. The electron source is surrounded by an insulating housing with a vacuum chamber, and a partition part is designed as a membrane carrier, carrying a nanomembrane at least in one section, the membrane separating the vacuum chamber from the outer region in a gastight manner and being at least partially designed to be electron-permeable. The vacuum chamber has a cathode for the emission of electrons. In the region of and/or on the nanomembrane, an anode arrangement is provided such that electrons are conducted against the nanomembrane and at least partially through it. The nanomembrane abuts the vacuum chamber of the vacuum pressure measuring device.
More Like This:
Inventors:
Knup, Bolfram
Buest, martin
Buest, martin
Application Number:
JP2009539582A
Publication Date:
July 31, 2013
Filing Date:
November 23, 2007
Export Citation:
Assignee:
Inficon GmbH
International Classes:
G01L21/32
Domestic Patent References:
| JP60139241U | ||||
| JP9185947A | ||||
| JP2003149069A | ||||
| JP2005062167A | ||||
| JP2005062176A |
Foreign References:
| WO2005091331A1 |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki